JPS6421787U - - Google Patents
Info
- Publication number
- JPS6421787U JPS6421787U JP11592287U JP11592287U JPS6421787U JP S6421787 U JPS6421787 U JP S6421787U JP 11592287 U JP11592287 U JP 11592287U JP 11592287 U JP11592287 U JP 11592287U JP S6421787 U JPS6421787 U JP S6421787U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- workpiece
- cleaning device
- automatic cleaning
- cylindrical body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Landscapes
- Cleaning In General (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11592287U JPH0437666Y2 (en]) | 1987-07-30 | 1987-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11592287U JPH0437666Y2 (en]) | 1987-07-30 | 1987-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421787U true JPS6421787U (en]) | 1989-02-03 |
| JPH0437666Y2 JPH0437666Y2 (en]) | 1992-09-03 |
Family
ID=31358007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11592287U Expired JPH0437666Y2 (en]) | 1987-07-30 | 1987-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437666Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006528551A (ja) * | 2003-05-22 | 2006-12-21 | アプライド マテリアルズ インコーポレイテッド | プロセスチャンバのコンポーネントの洗浄 |
-
1987
- 1987-07-30 JP JP11592287U patent/JPH0437666Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006528551A (ja) * | 2003-05-22 | 2006-12-21 | アプライド マテリアルズ インコーポレイテッド | プロセスチャンバのコンポーネントの洗浄 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437666Y2 (en]) | 1992-09-03 |